Nikon - Lithography Equipment

Nikon tsl-AOM Z4203P

Z4203P

Type:

Maximum Beam Power Output:

Split Frequency:

Lead Time:

Warranty:

Helium-Neon, 633nm, Continuous 

1mW 

15.0 ∼ 17.0Mhz

4 - 5 weeks 

1 year 

5517A

Type:

Maximum Beam Power Output:

Beam Diameter:

Reference Frequency:

Velocity:

Lead Time:

Warranty:

Helium-Neon, Continuous Wave, Two-Frequency

1mW

6mm (0.25 in) typical

1.5 ∼ 2.0Mhz

400mm/sec

4 - 5 weeks

1 year

Nikon tsl-HP-5517A

5517B

Type:

Maximum Beam Power Output:

Beam Diameter:

Reference Frequency:

Velocity:

Lead Time:

Warranty:

Helium-Neon, Continuous Wave, Two-Frequency

1mW

6mm (0.25 in) typical

1.9 ∼ 2.4Mhz

500mm/sec

4 - 5 weeks

1 year

Nikon tsl-HP-5517B
Nikon tsl-HP-5517C

5517C

Type:

Maximum Beam Power Output:

Beam Diameter:

Reference Frequency:

Velocity:

Lead Time:

Warranty:

Helium-Neon, Continuous Wave, Two-Frequency

1mW

6mm (0.25 in) typical

Option 003 - 3mm (0.125in) / Option 009 - 9mm (0.375in)

2.4 ∼ 3.0Mhz

700mm/sec

4 - 5 weeks

1 year

Nikon tsl-HP-5517D

5517D

Type:

Maximum Beam Power Output:

Beam Diameter:

Reference Frequency:

Velocity:

Lead Time:

Warranty:

Helium-Neon, Continuous Wave, Two-Frequency

1mW

6mm (0.25 in) typical

Option 009 - 9mm (0.375in)

3.4 ∼ 4.0Mhz

1000mm/sec

4 - 5 weeks

1 year

Nikon LINEAR SCALE RELAY AMP (Type 4A / 5 / All)

LINEAR SCALE RELAY AMP (Type 4A / 5 / All)

Type:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm, Continuous

Over 1mW

Linear

4 - 5 weeks

1 year

Nikon LINEAR SCALE RELAY AMP (For SF150 & SF155)

LINEAR SCALE RELAY AMP (For SF150 & SF155)

Type:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm, Continuous

Over 1mW

Linear

4 - 5 weeks

1 year

Nikon ZT RELAY AMP (3PORT) - Type 4, 5

ZT RELAY AMP (3PORT) - Type 4, 5

Type:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm, Continuous

Over 1mW

Linear

4 - 5 weeks

1 year

ZT RELAY AMP (6PORT) - Type 4, 4A

Type:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm, Continuous

Over 0.5mW

Linear

4 - 5 weeks

1 year

Nikon ZT RELAY AMP (6PORT) - Type 4, 4A