Nikon - Lithography Equipment

Z4203P
Type:
Maximum Beam Power Output:
Split Frequency:
Lead Time:
Warranty:
Helium-Neon, 633nm, Continuous
1mW
15.0 ∼ 17.0Mhz
4 - 5 weeks
1 year
5517A
Type:
Maximum Beam Power Output:
Beam Diameter:
Reference Frequency:
Velocity:
Lead Time:
Warranty:
Helium-Neon, Continuous Wave, Two-Frequency
1mW
6mm (0.25 in) typical
1.5 ∼ 2.0Mhz
400mm/sec
4 - 5 weeks
1 year

5517B
Type:
Maximum Beam Power Output:
Beam Diameter:
Reference Frequency:
Velocity:
Lead Time:
Warranty:
Helium-Neon, Continuous Wave, Two-Frequency
1mW
6mm (0.25 in) typical
1.9 ∼ 2.4Mhz
500mm/sec
4 - 5 weeks
1 year


5517C
Type:
Maximum Beam Power Output:
Beam Diameter:
​
Reference Frequency:
Velocity:
Lead Time:
Warranty:
Helium-Neon, Continuous Wave, Two-Frequency
1mW
6mm (0.25 in) typical
Option 003 - 3mm (0.125in) / Option 009 - 9mm (0.375in)
2.4 ∼ 3.0Mhz
700mm/sec
4 - 5 weeks
1 year

5517D
Type:
Maximum Beam Power Output:
Beam Diameter:
​
Reference Frequency:
Velocity:
Lead Time:
Warranty:
Helium-Neon, Continuous Wave, Two-Frequency
1mW
6mm (0.25 in) typical
Option 009 - 9mm (0.375in)
3.4 ∼ 4.0Mhz
1000mm/sec
4 - 5 weeks
1 year

LINEAR SCALE RELAY AMP (Type 4A / 5 / All)
Type:
Output Power:
Polarization:
Lead Time:
Warranty:
780nm, Continuous
Over 1mW
Linear
4 - 5 weeks
1 year

LINEAR SCALE RELAY AMP (For SF150 & SF155)
Type:
Output Power:
Polarization:
Lead Time:
Warranty:
780nm, Continuous
Over 1mW
Linear
4 - 5 weeks
1 year

ZT RELAY AMP (3PORT) - Type 4, 5
Type:
Output Power:
Polarization:
Lead Time:
Warranty:
780nm, Continuous
Over 1mW
Linear
4 - 5 weeks
1 year
ZT RELAY AMP (6PORT) - Type 4, 4A
Type:
Output Power:
Polarization:
Lead Time:
Warranty:
780nm, Continuous
Over 0.5mW
Linear
4 - 5 weeks
1 year
