ASML - Lithography Equipment

ASML AOM Z4203B_C_D

AOM (Z4203B/C/D)

Type:

Maximum Beam Power Output:

Split Frequency:

Lead Time:

Warranty:

Helium-Neon, 633nm, Continuous 

1mW 

Z4203B/C : 7.0∼9.0MHz 

Z4203D : 15.0∼17.0MHz 

4 - 5 weeks 

1 year 

ASML tsl-Green

GREEN

Wavelength:

Output Power:

Polarization Ratio (E-vector is vertical):

Beam Waist Diameter: Beam Divergence (full angle):

Lead Time:

Warranty:

532 ± 1nm

50mW

> 100 : 1

0.6mm(±10%)

< 1.2mrad

4 - 5 weeks

1 year

ASML tsl-Red

RED

Type:

Maximum output power (TEM00):

Polarization Ratio (minimum, P version):

Beam Diameter:

Beam Divergence:

Lead Time:

Warranty:

Helium-Neon

10mW

> 500 : 1

0.68mm(±3%)

1.2mrad

4 - 5 weeks

1 year

ASML tsl-Zero Box

ZERO BOX

Peak Wavelength:

Output Power From Fiber:

Lead Time:

Warranty:

670/690nm

Max. 1mW

4 - 5 weeks

1 year

ASML NIR (LM 4C IR1 780NM SLD MODULE)

NIR (LM 4C IR1 780NM SLD MODULE)

Type:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm, Continuous

Max. 10mW

Linear

4 - 5 weeks

1 year

ASML GREEN (LM 4C GREEN LASER MODULE 532NM)

GREEN (LM 4C GREEN LASER MODULE 532NM)

Type:

Output Power:

Polarization:

Lead Time:

Warranty:

532nm, Continuous

Max. 55mW

Linear

4 - 5 weeks

1 year

ASML HIGH ENCODER RESOLUTION BOARD (Version 1)

HIGH ENCODER RESOLUTION BOARD (Version 1)

Wavelength:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm

Max. 30mW

Linear

4 - 5 weeks

1 year

ASML HIGH ENCODER RESOLUTION BOARD (Version 2)

HIGH ENCODER RESOLUTION BOARD (Version 2)

Wavelength:

Output Power:

Polarization:

Lead Time:

Warranty:

780nm, Continuous

Max. 30mW

Linear

4 - 5 weeks

1 year